TY - GEN
T1 - Fabrication of nano channel systems in quartz by laser-induced splitting
AU - Qin, Julia S. J.
AU - Li, Wen J.
PY - 2001
Y1 - 2001
N2 - This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser has been used to dry fabricate micro channels (25μm-100νm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, a ID-controllable self-connecting nano fracture can be formed as a rectangular channel. This nano channel is smooth with extremely high aspect ratio (∼104 depth to width ratio). The length is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast, and inexpensive with potential applications in capillary electrophoresis, and electro-osmosis driven nano-filtration.
AB - This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser has been used to dry fabricate micro channels (25μm-100νm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, a ID-controllable self-connecting nano fracture can be formed as a rectangular channel. This nano channel is smooth with extremely high aspect ratio (∼104 depth to width ratio). The length is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast, and inexpensive with potential applications in capillary electrophoresis, and electro-osmosis driven nano-filtration.
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U2 - 10.1109/NANO.2001.966425
DO - 10.1109/NANO.2001.966425
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 780372158
VL - 2001-January
SP - 233
EP - 237
BT - Proceedings of the IEEE Conference on Nanotechnology
PB - IEEE Computer Society
T2 - 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001
Y2 - 28 October 2001 through 30 October 2001
ER -