Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system

Hanheng Du; Zhiwei Zhu; Zuankai Wang; Suet To

doi:10.1016/j.matdes.2023.111660

Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system

Hanheng Du, Zhiwei Zhu, Zuankai Wang, Suet To^*

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

13 Citations (Scopus)

24 Downloads (CityUHK Scholars)

Abstract

Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields. © 2023 The Author(s)

Original language	English
Article number	111660
Number of pages	11
Journal	Materials and Design
Volume	226
Online published	26 Jan 2023
DOIs	https://doi.org/10.1016/j.matdes.2023.111660
Publication status	Published - Feb 2023
Externally published	Yes

Funding

This work was funded by the Research Grants Council of the Hong Kong Special Administrative Region, China (Project No.: PolyU 15221322), the National Natural Science Foundation of China (Project No.: U19A20104 ), and State Key Laboratory of Ultra-precision Machining Technology.

Research Keywords

Cutting system
Finite element analysis
Micro/nanostructure array
Piezoelectric actuator
Ultraprecision machining
Vibration-assisted machining

Publisher's Copyright Statement

This full text is made available under CC-BY 4.0. https://creativecommons.org/licenses/by/4.0/

RGC Funding Information

RGC-funded

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.matdes.2023.111660

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abstract = "Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields. {\textcopyright} 2023 The Author(s)",

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doi = "10.1016/j.matdes.2023.111660",

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AU - Du, Hanheng

AU - Zhu, Zhiwei

AU - Wang, Zuankai

AU - To, Suet

PY - 2023/2

Y1 - 2023/2

N2 - Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields. © 2023 The Author(s)

AB - Micro/nanostructure arrays have been broadly applied in numerous industrial fields, such as optics, antibacterial fields, and anti-corrosion. However, the highly efficient fabrication of micro/nanostructure arrays, especially the high-aspect-ratio and hierarchical micro/nanostructure arrays, remains a challenge. Motivated by this, the study designs a novel piezoelectrically actuated (PA) cutting system for fabricating this kind of micro/nanostructure array. First, the mechanical structure of the PA cutting system is designed based on the circular flexure hinge. Then, a finite element model is established to analyze its resonant frequencies and mode shapes. Next, to determine the working performances of the PA cutting system, a performance test platform is built. Finally, various micro/nanostructure arrays with two features of the high-aspect-ratio and the multilayer are fabricated, demonstrating the effectiveness and flexibility of the PA cutting system. Besides, the function of machined micro/nanostructure arrays about the corrosion property was investigated. This study provides a new approach for fabricating high-aspect-ratio and hierarchical micro/nanostructure arrays, which can be applied in industrial manufacturing and corrosion protection fields. © 2023 The Author(s)

KW - Cutting system

KW - Finite element analysis

KW - Micro/nanostructure array

KW - Piezoelectric actuator

KW - Ultraprecision machining

KW - Vibration-assisted machining

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Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system

Abstract

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Research Keywords

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UN SDGs

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