Abstract
Using Mn+ implantation following ion beam-induced epitaxial crystallization (IBIEC) annealing, high Curie temperature ferromagnetic (Ga,Mn)As thin film was fabricated. The crystalline quality of the Mn+ implanted layer was identified by X-ray diffraction (XRD) and transmission electron microscopy (TEM). A clear ferromagnetic transition at Tc 253 K was observed by magnetization vs. temperature measurement. We infer that IBIEC treatment is a useful method not only for the low-temperature annealing of (Ga,Mn)As thin films but also for other dilute magnetic semiconductor (DMS) samples. © 2008 Elsevier B.V. All rights reserved.
Original language | English |
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Pages (from-to) | 1130-1132 |
Journal | Journal of Magnetism and Magnetic Materials |
Volume | 321 |
Issue number | 9 |
DOIs | |
Publication status | Published - May 2009 |
Externally published | Yes |
Research Keywords
- (Ga
- Magnetic materials
- Mn)As
- Recrystallization
- Solid-phase epitaxy