Fabrication of CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly
- Carmen K. M. Fung
- , Maggie Q. H. Zhang
- , Zaili Dong
- , Wen J. Li
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
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