Fabrication of channels in quartz cubes using laser-induced splitting

S. J. Qin, Wen J. Li, Michael Y. Wang

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

2 Citations (Scopus)

Abstract

A novel laser processing technique for making channels in the nano regime is presented in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
Original languageEnglish
Pages (from-to)763-768
JournalInternational Journal of Nonlinear Sciences and Numerical Simulation
Volume3
Issue number3-4
DOIs
Publication statusPublished - 2002
Externally publishedYes

Research Keywords

  • Laser micromachining
  • Laser-controlled fracture
  • Nano fluidic channels
  • Quartz processing

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