TY - JOUR
T1 - Fabrication of channels in quartz cubes using laser-induced splitting
AU - Qin, S. J.
AU - Li, Wen J.
AU - Wang, Michael Y.
PY - 2002
Y1 - 2002
N2 - A novel laser processing technique for making channels in the nano regime is presented in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
AB - A novel laser processing technique for making channels in the nano regime is presented in this paper. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.
KW - Laser micromachining
KW - Laser-controlled fracture
KW - Nano fluidic channels
KW - Quartz processing
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U2 - 10.1515/IJNSNS.2002.3.3-4.763
DO - 10.1515/IJNSNS.2002.3.3-4.763
M3 - RGC 21 - Publication in refereed journal
SN - 1565-1339
VL - 3
SP - 763
EP - 768
JO - International Journal of Nonlinear Sciences and Numerical Simulation
JF - International Journal of Nonlinear Sciences and Numerical Simulation
IS - 3-4
ER -