Fabrication of AlN-Silicon-on-Insulator Structure and Computer Simulation of Self-Heating Effect

Ming Zhu, Zhenghua An, Qing Lin, Zhengxuan Zhang, Ricky K. Y. Fu, Paul K. Chu, Chenglu Lin

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	45^th 2003 TMS Electronic Materials Conference & Exhibition - Technical Program with Abstracts
Pages	40
Publication status	Published - Jun 2003
Event	45th TMS Electronic Materials Conference & Exhibition (EMC 2003) - Salt Lake City, United States Duration: 25 Jun 2003 → 27 Jun 2003

Conference	45th TMS Electronic Materials Conference & Exhibition (EMC 2003)
Country/Territory	United States
City	Salt Lake City
Period	25/06/03 → 27/06/03

Other Access Options

@inproceedings{ffbda67425ae47e5a7ed5887cef5f4f6,

title = "Fabrication of AlN-Silicon-on-Insulator Structure and Computer Simulation of Self-Heating Effect",

author = "Ming Zhu and Zhenghua An and Qing Lin and Zhengxuan Zhang and Fu, {Ricky K. Y.} and Chu, {Paul K.} and Chenglu Lin",

year = "2003",

month = jun,

language = "English",

pages = "40",

booktitle = "45th 2003 TMS Electronic Materials Conference & Exhibition - Technical Program with Abstracts",

note = "45th TMS Electronic Materials Conference & Exhibition (EMC 2003) ; Conference date: 25-06-2003 Through 27-06-2003",

}

Zhu, M, An, Z, Lin, Q, Zhang, Z, Fu, RKY, Chu, PK & Lin, C 2003, Fabrication of AlN-Silicon-on-Insulator Structure and Computer Simulation of Self-Heating Effect. in 45^th 2003 TMS Electronic Materials Conference & Exhibition - Technical Program with Abstracts. pp. 40, 45th TMS Electronic Materials Conference & Exhibition (EMC 2003), Salt Lake City, Utah, United States, 25/06/03.

Fabrication of AlN-Silicon-on-Insulator Structure and Computer Simulation of Self-Heating Effect. / Zhu, Ming; An, Zhenghua; Lin, Qing et al.
45^th 2003 TMS Electronic Materials Conference & Exhibition - Technical Program with Abstracts. 2003. p. 40.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Fabrication of AlN-Silicon-on-Insulator Structure and Computer Simulation of Self-Heating Effect

AU - Zhu, Ming

AU - An, Zhenghua

AU - Lin, Qing

AU - Zhang, Zhengxuan

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

AU - Lin, Chenglu

PY - 2003/6

Y1 - 2003/6

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2003/03.C24.pdf

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 40

BT - 45th 2003 TMS Electronic Materials Conference & Exhibition - Technical Program with Abstracts

T2 - 45th TMS Electronic Materials Conference & Exhibition (EMC 2003)

Y2 - 25 June 2003 through 27 June 2003

ER -