Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

Hua Dai; Yao Shen; Jing Wang; Ming Xu; Liuhe Li; Xiaoling Li; Xun Cai; Paul K. Chu

doi:10.1063/1.2937195

Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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Engineering & Materials Science

100

Composite films Engineering & Materials S...

Vacuum Engineering & Materials S...

X rays Engineering & Materials S...

Surface resistance Engineering & Materials S...

Thermooxidation Engineering & Materials S...

Photoelectron spect... Engineering & Materials S...

Plating Engineering & Materials S...

Surface morphology Engineering & Materials S...

Cathodes Engineering & Materials S...

Diffraction Engineering & Materials S...

Fabrication Engineering & Materials S...

Thin films Engineering & Materials S...

Oxidation Engineering & Materials S...

Ions Engineering & Materials S...

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