Fabrication and microstructures of Si composite nanocone arrays

Multi-layer Si composite cones with nano-scale diameter were fabricated by a simple ion sputtering method, and characterized with scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), and electron energy loss spectroscopy. SEM observation showed that the asfabricated nanocone arrays on silicon substrates had a high density of 10 ¹⁰-10 ¹¹ cm ², diameters of less than 70 nm, and heights of about 200 nm. Cross-section HRTEM characterization revealed that the nanocones were composed of one-, two- or three-layer structures. The layer in these cones were identified to be pure Si, FeSi or 3C-SiC, and to have obvious orientation relationships. The formation mechanisms of the nanocones were discussed. © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.