Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Dominik J. Bell
  • Bradley J. Nelson
  • Matthias Golling
  • Li Zhang
  • Detlev Grützmacher

Detail(s)

Original languageEnglish
Pages (from-to)725-729
Journal / PublicationNano Letters
Volume6
Issue number4
Online published11 Mar 2006
Publication statusPublished - 1 Apr 2006
Externally publishedYes

Abstract

This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures. The process is based on conventional microfabrication techniques to create a planar pattern in an InGaAs/GaAs bilayer that self-assembles into 3D structures during a wet etch release. The nanostructures are proposed to function as nanosprings for electromechanical sensors. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical characterization. The results were validated by simulation.

Citation Format(s)

Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings. / Bell, Dominik J.; Dong, Lixin; Nelson, Bradley J.; Golling, Matthias; Zhang, Li; Grützmacher, Detlev.

In: Nano Letters, Vol. 6, No. 4, 01.04.2006, p. 725-729.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review