TY - GEN
T1 - Fabrication and characterization of self-scrolling Si/Cr micro- and nanostructures
AU - Zhang, Li
AU - Dong, Lixin
AU - Bell, Dominik J.
AU - Nelson, Bradley J.
AU - Gruetzmacher, Detlev A.
PY - 2006/1
Y1 - 2006/1
N2 - Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic manipulator. It has been found that multiple-turn Si/Cr nanorings exhibit a "sticky force" between neighboring bilayers which is mainly attributed to the van der Waals force. Thus, multiple-turn Si/Cr or SiGe/Si/Cr tubes are self-closing and may be used as pipes for micro-fluidics. Moreover, the excellent elasticity and shape-memory effect of these structures may also be utilized for building MEMS/NEMS devices. © 2006 IEEE.
AB - Based on self-scrolling of Si/Cr bilayer films on Si(001) wafers, various micro- and nanostructures including micro-claws, microtubes, helical nanobelts, nanorings and nanospirals are fabricated in a controllable way. The scrolling principles of the structures from Si/Cr bilayer films are discussed. The flexibility of individual Si/Cr nanospirals and nanorings has been investigated using a nanorobotic manipulator. It has been found that multiple-turn Si/Cr nanorings exhibit a "sticky force" between neighboring bilayers which is mainly attributed to the van der Waals force. Thus, multiple-turn Si/Cr or SiGe/Si/Cr tubes are self-closing and may be used as pipes for micro-fluidics. Moreover, the excellent elasticity and shape-memory effect of these structures may also be utilized for building MEMS/NEMS devices. © 2006 IEEE.
KW - Flexibility
KW - Nanoring
KW - Nanorobotic manipulation
KW - Nanospiral
KW - NEMS
UR - https://www.scopus.com/pages/publications/46249086456
UR - https://www.scopus.com/pages/publications/46249086456#tab=impact
U2 - 10.1109/NEMS.2006.334712
DO - 10.1109/NEMS.2006.334712
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 1-4244-0139-9
T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
SP - 1268
EP - 1271
BT - Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PB - IEEE
T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Y2 - 18 January 2006 through 21 January 2006
ER -