Fabrication and Characterization of a Sensitivity Multi-Annular Backscattered Electron Detector for Desktop SEM

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)Not applicablepeer-review

View graph of relations

Author(s)

  • Wei-Ruei Lin
  • Yun-Ju Chuang
  • Chih-Hao Lee
  • Fan-Gang Tseng
  • Fu-Rong Chen

Detail(s)

Original languageEnglish
Title of host publication2018 7th International Symposium on Next-Generation Electronics (ISNE)
PublisherIEEE
ISBN (Electronic)9781538614457
Publication statusPublished - May 2018
Externally publishedYes

Publication series

NameInternational Symposium on Next-Generation Electronics (ISNE)
PublisherIEEE
ISSN (Electronic)2378-8607

Conference

Title7th International Symposium on Next-Generation Electronics, ISNE 2018
PlaceTaiwan
CityTaipei
Period7 - 9 May 2018

Abstract

A sensitivity silicon p-n diodes for detecting backscattering electrons in SEM was proposed and fabricated. The multi-annular configuration enables to provide higher sensitivity of Z-contrast and better surface topography contrast of BSE image. In this study, the multi-annular backscattered electron detector (BSED) can provide enhancement of surface topography contrast and image contrast with 105% and 42% as compared with commercial BSED which with the multi-fan configuration. We also designed a high sensitivity to low energy electrons detector which with lateral p-n junctions and Al metal grids.

Research Area(s)

  • backscattered electron detector, Desktop SEM, SEM

Citation Format(s)

Fabrication and Characterization of a Sensitivity Multi-Annular Backscattered Electron Detector for Desktop SEM. / Lin, Wei-Ruei; Chuang, Yun-Ju; Lee, Chih-Hao; Tseng, Fan-Gang; Chen, Fu-Rong.

2018 7th International Symposium on Next-Generation Electronics (ISNE). IEEE, 2018. (International Symposium on Next-Generation Electronics (ISNE)).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)Not applicablepeer-review