Extreme-low-power thermal convective accelerometer based on cnt sensing element

This paper presents the operation principle and development of a micromachined thermal convective accelerometer featured with carbon Nanotube (CNT) sensing elements. The operation principle of this accelerometers is based on convection of fluids in a chamber. A DEP deposited CNT bundle creates a symmetrical thermal profile and another two CNT bundles working as thermal detectors are placed on both sides of the heater. External acceleration will lead to redistribution of the temperature profile around the heater and will be asymmetric. The temperature difference over the two detectors is picked up and transfered to resistance difference. This device can be operated by extreme lower power compared with thermal convective accelerometers with solid heating and sensing elements. Also this sensor requires no solid proof mass and is robust to shocks. © 2009 IEEE.