Extended Bandwidth Piezoelectric Lorentz Force Magnetometer Based on a Mechanically Coupled Beam Resonator Array

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Original languageEnglish
Journal / PublicationIEEE Transactions on Magnetics
Issue number10
Online published2 Aug 2018
Publication statusPublished - Oct 2018


We present a piezoelectric-on-silicon Lorentz force magnetometer (LFM) based on a mechanically coupled array of clamped-clamped beam resonators for the detection of lateral (x y plane) magnetic fields with an extended operating bandwidth of 1.36 kHz. The proposed device exploits piezoelectric transduction to greatly enhance the electromechanical coupling efficiency, which benefits the device sensitivity. Coupling multiple clamped-clamped beams increases the area for piezoelectric transduction, which further increases the sensitivity. The reported device has the widest operating bandwidth among LFMs reported to date with comparable normalized sensitivity despite the quality factor being limited to 30 when operating at ambient pressure instead of vacuum as in most cases of existing LFMs.

Research Area(s)

  • Bandwidth, Couplings, Magnetic field sensors, microelectromechanical systems (MEMS), Micromechanical devices, micromechanical resonators, Optical resonators, piezoelectric devices, Q-factor, Sensitivity, Silicon