Exploring pore formation of atomic layer-deposited overlayers by in situ small- and wide-angle X-ray scattering
- Tao Li
- , Saurabh Karwal
- , Bachir Aoun
- , Haiyan Zhao
- , Yang Ren
- , Christian P. Canlas
- , Jeffrey W. Elam
- , Randall E. Winans*
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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