Experimental Investigation of Dual Plasma Layer Formation around the Anode in Magnetized Radio Frequency Inductively Coupled Hydrogen Plasma

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Detail(s)

Original languageEnglish
Journal / PublicationIEEE International Conference on Plasma Science
Publication statusPublished - 2003

Conference

Title2003 IEEE International Conference on Plasma Science
PlaceKorea, Republic of
CityJeju
Period2 - 5 June 2003

Abstract

A dual plasma layer is created in magnetized radio frequency (RF) inductively coupled plasma (ICP). The effects of the external magnetic field and anode voltage on the evolution of the cylindrical luminous dual plasma layer from the anode glow are investigated in magnetized hydrogen plasmas. The anode glow is initially produced from the additional DC discharge which forms when a cylindrical anode platform inserted into the plasma diffusion region is positively biased. If the anode voltage is sufficiently high, the anode glow is transformed into an elongated luminous dual layer around the anode in the plasma diffusion region, in which a diverging magnetic field is coupled with an external magnetic field. The weakly magnetized plasma is needed for the formation of this double layer, and there is an upper limit on the magnetic field strength, beyond which the dual plasma layer disappears. The dependence of the dual layer structure on the magnetic field strength, anode voltage and the neutral gas pressure are also studied. The double layer structures are visually apparent because of the enhanced light emission from the neutrals excited by the energetic electrons. Some photographs of these structures will also be shown to demonstrate the phenomenon.