Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Physics

100
Ion Implantation Physics
100
Glow Discharge Physics
100
Blood Plasma Physics
16
Particle Motion Physics
16
Electric Field Physics
Research OutputsResearch Output authored by Experimental investigation of discharge characteristics in enhanced glow discharge plasma immersion ion implantation is tagged with the concept