Excimer Laser Patterning Technologies for Microfabrication

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • D.J. Ehrlich
  • P.A. Maki
  • M. Rothschild
  • R.R. Kunz
  • M.W. Horn
  • M.A. Hartney

Related Research Unit(s)

Detail(s)

Original languageEnglish
Pages (from-to)1-11
Journal / PublicationTurkish Journal of Physics
Volume14
Issue numberSupp. 1
Publication statusPublished - 1990

Conference

TitleInternational Conference on BEAM-SOLID INTERACTIONS
LocationMiddle East Technical University
PlaceTürkiye
CityAnkara
Period24 - 28 April 1989

Bibliographic Note

Research Unit(s) information for this publication is provided by the author(s) concerned.

Citation Format(s)

Excimer Laser Patterning Technologies for Microfabrication. / Ehrlich, D.J.; Maki, P.A. ; Pang, S.W. et al.
In: Turkish Journal of Physics, Vol. 14, No. Supp. 1, 1990, p. 1-11.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review