Excess silicon at the silicon nitride/thermal oxide interface in oxide-nitride-oxide structures
- V. A. Gritsenko
- , Hei Wong
- , J. B. Xu
- , R. M. Kwok
- , I. P. Petrenko
- , B. A. Zaitsev
- , Yu N. Morokov
- , Yu N. Novikov
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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