EXAFS measurements of metal-decorated nanocavities in Si

G. de M. Azevedo; M. C. Ridgway; J. Betlehem; K. M. Yu; C. J. Glover; G. J. Foran

doi:10.1016/S0168-583X(02)01430-1

EXAFS measurements of metal-decorated nanocavities in Si

G. de M. Azevedo, M. C. Ridgway, J. Betlehem, K. M. Yu, C. J. Glover, G. J. Foran

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Abstract

The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.

Original language	English
Pages (from-to)	179-184
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	199
DOIs	https://doi.org/10.1016/S0168-583X(02)01430-1
Publication status	Published - Jan 2003
Externally published	Yes

Research Keywords

Cavities
EXAFS
Gettering
Silicon
Voids

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10.1016/S0168-583X(02)01430-1

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title = "EXAFS measurements of metal-decorated nanocavities in Si",

abstract = "The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.",

keywords = "Cavities, EXAFS, Gettering, Silicon, Voids",

author = "Azevedo, {G. de M.} and Ridgway, {M. C.} and J. Betlehem and Yu, {K. M.} and Glover, {C. J.} and Foran, {G. J.}",

year = "2003",

month = jan,

doi = "10.1016/S0168-583X(02)01430-1",

language = "English",

volume = "199",

pages = "179--184",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - EXAFS measurements of metal-decorated nanocavities in Si

AU - Azevedo, G. de M.

AU - Ridgway, M. C.

AU - Betlehem, J.

AU - Yu, K. M.

AU - Glover, C. J.

AU - Foran, G. J.

PY - 2003/1

Y1 - 2003/1

N2 - The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.

AB - The metal-decorated nanocavities in Si were discussed using EXAFS measurements. A sample preparation methodology to enable the identification with synchrotron radiation-based analytical techniques, of the gettering sites of metallic impurities on the internal walls of implantation-induced nanocavities in Si substrates was elaborated. The preliminary results for the Cu-Si and Cu-Cu bond lengths on the internal surface of the nanocavities were also presented.

KW - Cavities

KW - EXAFS

KW - Gettering

KW - Silicon

KW - Voids

UR - http://www.scopus.com/inward/record.url?scp=0037244293&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0037244293&origin=recordpage

U2 - 10.1016/S0168-583X(02)01430-1

DO - 10.1016/S0168-583X(02)01430-1

M3 - RGC 21 - Publication in refereed journal

SN - 0168-583X

VL - 199

SP - 179

EP - 184

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

EXAFS measurements of metal-decorated nanocavities in Si

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Research Keywords

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