Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing
- Xinzhong Duo*
- , Weili Liu
- , Miao Zhang
- , Lianwei Wang
- , Chenglu Lin
- , M. Okuyama
- , M. Noda
- , Wing-Yiu Cheung
- , S. P. Wong
- , Paul K. Chu
- , Peigang Hu
- , S. X. Wang
- , L. M. Wang
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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