Etching in the Presence of Alternating Voltage Profile and Resulting Porous Structure

Research output: Patents, Agreements and Assignments (RGC: 51, 52)51_Patents (CityU)

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Author(s)

Detail(s)

Original languageEnglish
Patent numberUS9,840,789
Filing number14/159,270
Publication status
  • Accepted/In press/Filed - 20 Jan 2014
  • Published - 12 Dec 2017

Citation Format(s)

Etching in the Presence of Alternating Voltage Profile and Resulting Porous Structure. / LI, Yangyang (Inventor); LU, Jian (Inventor); ZHANG, Jie (Inventor).
Patent No.: US9,840,789. Dec 12, 2017.

Research output: Patents, Agreements and Assignments (RGC: 51, 52)51_Patents (CityU)