Etch-hole-assisted energy dispersion for enhancing quality factor in silicon bulk acoustic resonators

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Overview

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Material Science

Resonator Material Science

Bulk Silicon Material Science

Piezoelectricity Material Science

Finite Element Meth... Material Science

Aluminum Nitride Material Science

Single Crystal Material Science

Engineering

Resonator Engineering

Q Factor Engineering

Bulk Silicon Engineering

Dispersion Energy Engineering

Strain Energy Engineering

Nitride Engineering

Piezoelectric Engineering

Silicon Single Crys... Engineering

Finite Element Simu... Engineering

Nodal Line Engineering

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