Enriching of the Si3N4 - Thermal oxide interface by excess silicon in ONO structures

V. A. Gritsenko; Yu N. Morokov; Yu N. Novikov; I. P. Petrenko; S. N. Svitasheva; H. Wong

doi:10.1016/S0167-9317(97)00030-0

Enriching of the Si₃N₄ - Thermal oxide interface by excess silicon in ONO structures

V. A. Gritsenko
, Yu N. Morokov
, Yu N. Novikov
, I. P. Petrenko
, S. N. Svitasheva
, H. Wong

Department of Electrical Engineering

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

3 Citations (Scopus)

Original language	English
Pages (from-to)	123-124
Journal	Microelectronic Engineering
Volume	36
Issue number	1-4
DOIs	https://doi.org/10.1016/S0167-9317(97)00030-0
Publication status	Published - Jun 1997

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@article{79b8f89e131e46dcab0db697d2c8646c,

title = "Enriching of the Si3N4 - Thermal oxide interface by excess silicon in ONO structures",

author = "Gritsenko, \{V. A.\} and Morokov, \{Yu N.\} and Novikov, \{Yu N.\} and Petrenko, \{I. P.\} and Svitasheva, \{S. N.\} and H. Wong",

year = "1997",

month = jun,

doi = "10.1016/S0167-9317(97)00030-0",

language = "English",

volume = "36",

pages = "123--124",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "1-4",

}

TY - JOUR

T1 - Enriching of the Si3N4 - Thermal oxide interface by excess silicon in ONO structures

AU - Gritsenko, V. A.

AU - Morokov, Yu N.

AU - Novikov, Yu N.

AU - Petrenko, I. P.

AU - Svitasheva, S. N.

AU - Wong, H.

PY - 1997/6

Y1 - 1997/6

UR - https://www.scopus.com/pages/publications/0031150230

UR - https://www.scopus.com/pages/publications/0031150230#tab=impact

U2 - 10.1016/S0167-9317(97)00030-0

DO - 10.1016/S0167-9317(97)00030-0

M3 - RGC 21 - Publication in refereed journal

SN - 0167-9317

VL - 36

SP - 123

EP - 124

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4