Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

P. Thiruvenkatanathan; J. Yan; J. E Y Lee; A. A. Seshia

doi:10.1109/SENSOR.2009.5285444

Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

P. Thiruvenkatanathan
, J. Yan
, J. E Y Lee
, A. A. Seshia^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

18 Citations (Scopus)

Abstract

We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2350-2353
DOIs	https://doi.org/10.1109/SENSOR.2009.5285444
Publication status	Published - 2009
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 21 Jun 2009 → 25 Jun 2009

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Place	United States
City	Denver, CO
Period	21/06/09 → 25/06/09

Research Keywords

Electrical coupling
Mode localization
Parametric sensitivity
Resonator

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10.1109/SENSOR.2009.5285444

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@inproceedings{ebbf21e77cf34b62b55c295bc9fa7c77,

title = "Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators",

abstract = "We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. {\textcopyright}2009 IEEE.",

keywords = "Electrical coupling, Mode localization, Parametric sensitivity, Resonator",

author = "P. Thiruvenkatanathan and J. Yan and Lee, \{J. E Y\} and Seshia, \{A. A.\}",

year = "2009",

doi = "10.1109/SENSOR.2009.5285444",

language = "English",

isbn = "9781424441938",

pages = "2350--2353",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

Thiruvenkatanathan, P, Yan, J, Lee, JEY & Seshia, AA 2009, Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285444, pp. 2350-2353, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 21/06/09. https://doi.org/10.1109/SENSOR.2009.5285444

Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators. / Thiruvenkatanathan, P.; Yan, J.; Lee, J. E Y et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 2350-2353 5285444.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

AU - Thiruvenkatanathan, P.

AU - Yan, J.

AU - Lee, J. E Y

AU - Seshia, A. A.

PY - 2009

Y1 - 2009

N2 - We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.

AB - We use vibration localization as a sensitive means of detecting small perturbations in stiffness in a pair of weakly coupled micromechanical resonators. For the first time, the variation in the eigenstates is studied by electrostatically coupling nearly identical resonators to allow for stronger localization of vibrational energy due to perturbations in stiffness. Eigenstate variations that are orders of magnitude greater than corresponding shifts in resonant frequency for an induced stiffness perturbation are experimentally demonstrated. Such high, voltagetunable parametric sensitivities together with the added advantage of intrinsic common mode rejection pave the way to a new paradigm of mechanical sensing. ©2009 IEEE.

KW - Electrical coupling

KW - Mode localization

KW - Parametric sensitivity

KW - Resonator

UR - https://www.scopus.com/pages/publications/71449097760

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-71449097760&origin=recordpage

U2 - 10.1109/SENSOR.2009.5285444

DO - 10.1109/SENSOR.2009.5285444

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781424441938

SP - 2350

EP - 2353

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

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