Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

A. Iqbal; W. Zhang; J. E Y Lee

doi:10.1109/Transducers.2013.6627036

Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

A. Iqbal, W. Zhang, J. E Y Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

6 Citations (Scopus)

Abstract

This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). © 2013 IEEE.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	1384-1387
DOIs	https://doi.org/10.1109/Transducers.2013.6627036
Publication status	Published - 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013) - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013)
Abbreviated title	Transducers’13 and Eurosensors XVII
Place	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

Research Keywords

Array
Disk Resonator
Mechanical Coupling
Piezoresistive Sensing
Quality Factor
Transconductance

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10.1109/Transducers.2013.6627036

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Iqbal, A., Zhang, W., & Lee, J. E. Y. (2013). Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 1384-1387). Article 6627036 https://doi.org/10.1109/Transducers.2013.6627036

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title = "Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array",

abstract = "This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). {\textcopyright} 2013 IEEE.",

keywords = "Array, Disk Resonator, Mechanical Coupling, Piezoresistive Sensing, Quality Factor, Transconductance",

author = "A. Iqbal and W. Zhang and Lee, {J. E Y}",

year = "2013",

doi = "10.1109/Transducers.2013.6627036",

language = "English",

isbn = "9781467359818",

pages = "1384--1387",

booktitle = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

note = "17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013), Transducers{\textquoteright}13 and Eurosensors XVII ; Conference date: 16-06-2013 Through 20-06-2013",

}

Iqbal, A, Zhang, W & Lee, JEY 2013, Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627036, pp. 1384-1387, 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013), Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627036

Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array. / Iqbal, A.; Zhang, W.; Lee, J. E Y.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 1384-1387 6627036.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

AU - Iqbal, A.

AU - Zhang, W.

AU - Lee, J. E Y

PY - 2013

Y1 - 2013

N2 - This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). © 2013 IEEE.

AB - This paper presents the mechanical coupling of SOI disk resonators for synchronized oscillation of a resonator array. The synchronized array of disk resonators has the added enhancement of employing piezoresistive readout to boost electromechanical transconduction. Compared to a single disk resonator using capacitive readout, an array of two disks employing piezoresistive sensing provides a 18.2dB reduction in the insertion loss. In terms of quality factor (Q), rather than suffer a reduction as a result of the coupling, the coupled disk array even showed a doubling of Q relative to that of a single disk resonator (184,000 as compared to 95,000). © 2013 IEEE.

KW - Array

KW - Disk Resonator

KW - Mechanical Coupling

KW - Piezoresistive Sensing

KW - Quality Factor

KW - Transconductance

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U2 - 10.1109/Transducers.2013.6627036

DO - 10.1109/Transducers.2013.6627036

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781467359818

SP - 1384

EP - 1387

BT - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS 2013)

Y2 - 16 June 2013 through 20 June 2013

ER -

Enhanced piezoresistive sensing via synchronized oscillations in a mechanically coupled disk array

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