Enhanced mechanical properties of CrN coatings by plasma immersion ion implantation and deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Original languageEnglish
Pages (from-to)6713-6719
Journal / PublicationCeramics International
Issue number4
Online published19 Oct 2022
Publication statusPublished - 15 Feb 2023


Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 × 1014/m2 to 1.3 × 1017/m2. In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised.

Research Area(s)

  • CrN coatings, Crystal defects, Ion energy, Mechanical properties, PIII&D, Plasma immersion ion implantation and deposition

Citation Format(s)