Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency

Weiguan ZHANG; Haoshen ZHU; En-yuan Joshua LEE

Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency

Weiguan ZHANG, Haoshen ZHU, En-yuan Joshua LEE

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 22 Sept 2014
Event	40th Int. Conf. on Micro and Nano Engineering (MNE 2014) - , Switzerland Duration: 22 Sept 2014 → 26 Sept 2014

Conference

Conference	40th Int. Conf. on Micro and Nano Engineering (MNE 2014)
Place	Switzerland
Period	22/09/14 → 26/09/14

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@conference{c77abd497bcf4e22bd475bb79baf3105,

title = "Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency",

author = "Weiguan ZHANG and Haoshen ZHU and LEE, {En-yuan Joshua}",

year = "2014",

month = sep,

day = "22",

language = "English",

note = "40th Int. Conf. on Micro and Nano Engineering (MNE 2014) ; Conference date: 22-09-2014 Through 26-09-2014",

}

Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency. / ZHANG, Weiguan; ZHU, Haoshen; LEE, En-yuan Joshua.
2014. Paper presented at 40th Int. Conf. on Micro and Nano Engineering (MNE 2014), Switzerland.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Enhanced linear electrical characterization of a silicon double-ended tuning fork resonator by piezoresistive detection at the fundamental excitation frequency

AU - ZHANG, Weiguan

AU - ZHU, Haoshen

AU - LEE, En-yuan Joshua

PY - 2014/9/22

Y1 - 2014/9/22

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 40th Int. Conf. on Micro and Nano Engineering (MNE 2014)

Y2 - 22 September 2014 through 26 September 2014

ER -