Elimination of the amorphous AlN/Si interface layer and the growth mechanism of textured AlN thin films deposited on silicon substrates

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 2007

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@conference{3e27a6294a064d0696ac4b1e4b575e82,

title = "Elimination of the amorphous AlN/Si interface layer and the growth mechanism of textured AlN thin films deposited on silicon substrates",

author = "YAO, \{Zhi Qiang\} and Qing YE and LI, \{Yan Qing\} and ZOU, \{You Sheng\} and ZHANG, \{Wen Jun\} and LEE, \{Shuit Tong\}",

year = "2007",

language = "English",

}