Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth

Sagnik Ghosh; Joshua E.-Y. Lee

doi:10.1109/TRANSDUCERS.2019.8808236

Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth

Sagnik Ghosh
, Joshua E.-Y. Lee^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11^th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11^th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	IEEE
Pages	146-149
ISBN (Electronic)	978-1-5386-8104-6
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808236
Publication status	Published - Jun 2019
Event	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Estrel Congress Center, Berlin, Germany Duration: 23 Jun 2019 → 27 Jun 2019 http://www.transducers-eurosensors2019.org

Publication series

Name	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII

Conference

Conference	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Place	Germany
City	Berlin
Period	23/06/19 → 27/06/19
Internet address	http://www.transducers-eurosensors2019.org

Research Keywords

Aluminum Nitride on Silicon resonators.
Lamb wave mode resonators
Lorentz force
MEMS magnetic sensors
piezoelectric devices

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10.1109/TRANSDUCERS.2019.8808236

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Ghosh, S., & Lee, J. E.-Y. (2019). Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 146-149). Article 8808236 (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII). IEEE. https://doi.org/10.1109/TRANSDUCERS.2019.8808236

Ghosh, Sagnik ; Lee, Joshua E.-Y. / Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. pp. 146-149 (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII).

@inproceedings{a0bdd1d90225423cbc4c678ecdf46539,

title = "Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth",

abstract = "We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.",

keywords = "Aluminum Nitride on Silicon resonators., Lamb wave mode resonators, Lorentz force, MEMS magnetic sensors, piezoelectric devices",

author = "Sagnik Ghosh and Lee, \{Joshua E.-Y.\}",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808236",

language = "English",

series = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII",

publisher = "IEEE",

pages = "146--149",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

note = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXXIII (TRANSDUCERS \& EUROSENSORS XXXIII) ; Conference date: 23-06-2019 Through 27-06-2019",

url = "http://www.transducers-eurosensors2019.org",

}

Ghosh, S & Lee, JE-Y 2019, Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808236, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, IEEE, pp. 146-149, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, 23/06/19. https://doi.org/10.1109/TRANSDUCERS.2019.8808236

Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. / Ghosh, Sagnik ; Lee, Joshua E.-Y.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE, 2019. p. 146-149 8808236 (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth

AU - Ghosh, Sagnik

AU - Lee, Joshua E.-Y.

PY - 2019/6

Y1 - 2019/6

N2 - We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.

AB - We report the novel use of a higher harmonic Lamb wave modes to realize a piezoelectric readout Lorentz force magnetometer (LFM). The proposed design aims to significantly enhance the pre-amplified sensitivity per unit of excitation current (referred to as the responsivity here) relative to the fundamental mode in the same resonator. By exploiting an 11th harmonic Lamb mode biconvex resonator, we experimentally demonstrate over 5 times increase in responsivity over another device based on the fundamental mode. Compared to state-of-art capacitive LFMs encapsulated in vacuum for high quality factor (Q), the 11th order Lamb wave LFM reported herein boasts a ten-fold boost to responsivity (26.8ppm/mT) in ambient (i.e. atmospheric) pressure.

KW - Aluminum Nitride on Silicon resonators.

KW - Lamb wave mode resonators

KW - Lorentz force

KW - MEMS magnetic sensors

KW - piezoelectric devices

UR - https://www.scopus.com/pages/publications/85071952058

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85071952058&origin=recordpage

U2 - 10.1109/TRANSDUCERS.2019.8808236

DO - 10.1109/TRANSDUCERS.2019.8808236

M3 - RGC 32 - Refereed conference paper (with host publication)

T3 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII

SP - 146

EP - 149

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - IEEE

T2 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

Y2 - 23 June 2019 through 27 June 2019

ER -

Ghosh S , Lee JEY. Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. IEEE. 2019. p. 146-149. 8808236. (20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808236

Eleventh Order Lamb Wave Mode Biconvex Piezoelectric Lorentz Force Magnetometer for Scaling Up Responsivity and Bandwidth

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