Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

Fumihito Arai; Pou Liu; Lixin  Dong; Masahiro Nakajima; Toshio  Fukuda

doi:10.1109/NANO.2003.1231038

Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

Fumihito Arai
, Pou Liu
, Lixin Dong
, Masahiro Nakajima
, Toshio Fukuda

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

6 Citations (Scopus)

Abstract

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)₆) and dimethyl-gold ((CH₃)₂(C₅H₇O₂)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)₆, mass of the tungsten reaches up to 80% among the compositions.

Original language	English
Title of host publication	2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings
Publisher	IEEE
Pages	811-814
Volume	2
ISBN (Print)	0-7803-7976-4
DOIs	https://doi.org/10.1109/NANO.2003.1231038
Publication status	Published - Aug 2003
Externally published	Yes
Event	2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States Duration: 12 Aug 2003 → 14 Aug 2003

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
Volume	2
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Conference

Conference	2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003
Place	United States
City	San Francisco
Period	12/08/03 → 14/08/03

Research Keywords

Carbon dioxide
Carbon nanotubes
Conductivity
Electron tubes
Glass
Heating
Nanostructures
Systems engineering and theory
Temperature
Tungsten

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10.1109/NANO.2003.1231038

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Arai, F., Liu, P., Dong, L., Nakajima, M., & Fukuda, T. (2003). Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters. In 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings (Vol. 2, pp. 811-814). Article 1231038 (Proceedings of the IEEE Conference on Nanotechnology; Vol. 2). IEEE. https://doi.org/10.1109/NANO.2003.1231038

@inproceedings{274513760dbe4e3f9a911ef5f5bf503a,

title = "Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters",

abstract = "Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)6) and dimethyl-gold ((CH3)2(C5H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to 80\% among the compositions.",

keywords = "Carbon dioxide, Carbon nanotubes, Conductivity, Electron tubes, Glass, Heating, Nanostructures, Systems engineering and theory, Temperature, Tungsten",

author = "Fumihito Arai and Pou Liu and Lixin Dong and Masahiro Nakajima and Toshio Fukuda",

year = "2003",

month = aug,

doi = "10.1109/NANO.2003.1231038",

language = "English",

isbn = "0-7803-7976-4",

volume = "2",

series = "Proceedings of the IEEE Conference on Nanotechnology",

publisher = "IEEE",

pages = "811--814",

booktitle = "2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings",

address = "United States",

note = "2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 ; Conference date: 12-08-2003 Through 14-08-2003",

}

Arai, F, Liu, P, Dong, L, Nakajima, M & Fukuda, T 2003, Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters. in 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings. vol. 2, 1231038, Proceedings of the IEEE Conference on Nanotechnology, vol. 2, IEEE, pp. 811-814, 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003, San Francisco, United States, 12/08/03. https://doi.org/10.1109/NANO.2003.1231038

Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters. / Arai, Fumihito; Liu, Pou; Dong, Lixin et al.
2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings. Vol. 2 IEEE, 2003. p. 811-814 1231038 (Proceedings of the IEEE Conference on Nanotechnology; Vol. 2).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

AU - Arai, Fumihito

AU - Liu, Pou

AU - Dong, Lixin

AU - Nakajima, Masahiro

AU - Fukuda, Toshio

PY - 2003/8

Y1 - 2003/8

N2 - Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)6) and dimethyl-gold ((CH3)2(C5H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to 80% among the compositions.

AB - Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)6) and dimethyl-gold ((CH3)2(C5H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to 80% among the compositions.

KW - Carbon dioxide

KW - Carbon nanotubes

KW - Conductivity

KW - Electron tubes

KW - Glass

KW - Heating

KW - Nanostructures

KW - Systems engineering and theory

KW - Temperature

KW - Tungsten

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84885375778&origin=recordpage

U2 - 10.1109/NANO.2003.1231038

DO - 10.1109/NANO.2003.1231038

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-7976-4

VL - 2

T3 - Proceedings of the IEEE Conference on Nanotechnology

SP - 811

EP - 814

BT - 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings

PB - IEEE

T2 - 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003

Y2 - 12 August 2003 through 14 August 2003

ER -

Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

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