Abstract
TaMoSiN composite films were deposited on Ti6Al4V via magnetron sputtering. The microstructure, mechanical properties, antibacterial performance, and electrochemical/tribological behaviors in Hank's solution were systematically investigated. Increasing the Ta target power transformed the growth morphology from a columnar to a featureless structure, resulting in a nanocomposite consisting of metallic ceramic phases, amorphous Si3N4, and minor oxides. Film hardness first increased and then decreased with rising Ta power, reaching a maximum of 20.13 GPa for the Ta15 film. The Ta15 and Ta35 films exhibited comparable corrosion resistance, superior to that of the Ta5, Ta25 films, and the Ti6Al4V substrate. In Hank's solution, the friction coefficient and wear rate of the films first decreased and then increased with Ta power, the Ta15 film showed the lowest values. The dominant wear mechanism transitioned from abrasive wear to severe fatigue spalling. All TaMoSiN films demonstrated an antibacterial rate exceeding 80%, significantly higher than that of the Ti6Al4V substrate. This antibacterial performance was largely insensitive to Ta content and was primarily influenced by the amorphous Si3N4 phase and Mo element. © 2026 Elsevier Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies.
| Original language | English |
|---|---|
| Article number | 115412 |
| Journal | Vacuum |
| Volume | 252 |
| Online published | 4 May 2026 |
| DOIs | |
| Publication status | Published - Sept 2026 |
Funding
This work has been supported by “the National Natural Science Foundation of China (No. 51775271)” and “the Fundamental Research Funds for the Central Universities (NO. NZ2024037)”. We would like to acknowledge for their financial support.
Research Keywords
- Antibacterial performance
- Electrochemical and tribological behaviors
- Micro-featured surface
- Microstructure
- TaMoSiN films
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