Electrical Properties of Aluminum Nitride Thin Films Prepared by Pulsed Laser Deposition

Z. H. An; C. L. Men; Z. K.  Xu; Paul K. Chu; C. L. Lin

Electrical Properties of Aluminum Nitride Thin Films Prepared by Pulsed Laser Deposition

Z. H. An
, C. L. Men
, Z. K. Xu
, Paul K. Chu
, C. L. Lin

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	37
Publication status	Published - Sept 2003
Event	13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03) - San Antonio, United States Duration: 21 Sept 2003 → 26 Sept 2003

Conference

Conference	13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03)
Abbreviated title	SMMIB 2003
Place	United States
City	San Antonio
Period	21/09/03 → 26/09/03

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@conference{3c51ecc3a6bd4a9995fa90b4c96ca68b,

title = "Electrical Properties of Aluminum Nitride Thin Films Prepared by Pulsed Laser Deposition",

author = "An, \{Z. H.\} and Men, \{C. L.\} and Xu, \{Z. K.\} and Chu, \{Paul K.\} and Lin, \{C. L.\}",

year = "2003",

month = sep,

language = "English",

pages = "37",

note = "13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03), SMMIB 2003 ; Conference date: 21-09-2003 Through 26-09-2003",

}

Electrical Properties of Aluminum Nitride Thin Films Prepared by Pulsed Laser Deposition. / An, Z. H.; Men, C. L.; Xu, Z. K. et al.
2003. 37 Paper presented at 13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03), San Antonio, Texas, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Electrical Properties of Aluminum Nitride Thin Films Prepared by Pulsed Laser Deposition

AU - An, Z. H.

AU - Men, C. L.

AU - Xu, Z. K.

AU - Chu, Paul K.

AU - Lin, C. L.

PY - 2003/9

Y1 - 2003/9

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 37

T2 - 13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03)

Y2 - 21 September 2003 through 26 September 2003

ER -