ELECTRICAL PARAMETER CONTROL FOR SEMICONDUCTOR DEVICE MANUFACTURING : A FABWIDE APPROACH

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

1 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)135-140
Journal / PublicationIFAC Proceedings Volumes (IFAC-PapersOnline)
Volume40
Issue number5
Publication statusPublished - 2007
Externally publishedYes

Conference

Title8th IFAC Symposium on Dynamics and Control of Process Systems, 2007
PlaceMexico
CityCancun
Period6 - 8 June 2016

Link(s)

DOI

DOI
Check@CityULib
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-85014157834&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(477781e7-3c14-4414-8f9b-07bbb81b2695).html

Abstract

Wafers that fail to meet their electrical specifications lead to scrap which negatively impacts yield and manufacturing costs. Most existing research has focused on controlling individual steps during the manufacturing process via run-to-run control, but almost no work has looked at directly controlling the electrical characteristics. A control scheme is proposed to directly control electrical parameter values. The control algorithm uses a model to predict electrical parameter values after each processing step and determines optimal adjustments for the future processing steps. Simulation results show significant reduction in electrical parameter variations for both constrained and unconstrained control.

Research Area(s)

  • Hierarchical control, Least squares estimation, Multi-step controllers

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Publication fingerprints text

100
Parameter Control Keyphrases
100
Electrical Paramete... Keyphrases
100
Semiconductor Devic... Keyphrases
100
manufacturing INIS
100
control INIS
100
semiconductor devic... INIS
100
Gas Fuel Manufactur... Engineering
100
Semiconductor Devic... Engineering
100
Processing Step Engineering
100
Electrical Property Material Science
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Citation Format(s)

[ RIS ] [ BibTeX ]
ELECTRICAL PARAMETER CONTROL FOR SEMICONDUCTOR DEVICE MANUFACTURING: A FABWIDE APPROACH. / Schoene, Clare; Qin, S. Joe; Kutanoglu, Erhan et al.
In: IFAC Proceedings Volumes (IFAC-PapersOnline), Vol. 40, No. 5, 2007, p. 135-140.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review