ELECTRICAL PARAMETER CONTROL FOR SEMICONDUCTOR DEVICE MANUFACTURING : A FABWIDE APPROACH

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

1 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)135-140
Journal / PublicationIFAC Proceedings Volumes (IFAC-PapersOnline)
Volume40
Issue number5
Publication statusPublished - 2007
Externally publishedYes

Conference

Title8th IFAC Symposium on Dynamics and Control of Process Systems, 2007
PlaceMexico
CityCancun
Period6 - 8 June 2016

Abstract

Wafers that fail to meet their electrical specifications lead to scrap which negatively impacts yield and manufacturing costs. Most existing research has focused on controlling individual steps during the manufacturing process via run-to-run control, but almost no work has looked at directly controlling the electrical characteristics. A control scheme is proposed to directly control electrical parameter values. The control algorithm uses a model to predict electrical parameter values after each processing step and determines optimal adjustments for the future processing steps. Simulation results show significant reduction in electrical parameter variations for both constrained and unconstrained control.

Research Area(s)

  • Hierarchical control, Least squares estimation, Multi-step controllers

Citation Format(s)