Electrical activation and local structure of Se atoms in ion-implanted indium phosphide

Research output: Journal Publications and ReviewsRGC 62 - Review of books or of software (or similar publications/items)peer-review

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Detail(s)

Original languageEnglish
Pages (from-to)8445-8450
Journal / PublicationJournal of Applied Physics
Volume79
Issue number11
Publication statusPublished - 1 Jun 1996
Externally publishedYes

Abstract

The solid phase regrowth, dopant activation, and local environments of Se-implanted InP are investigated with ion-beam techniques and extended x-ray-absorption fine structure spectroscopy. We find that the local Se-In structure is already established in the as-implanted amorphous InP although the Se atoms have a lower average coordination number (∼3.5) and no long-range order. After high-temperature rapid thermal annealing (950 °C, 5 s), the amorphous InP regrows, becoming a single crystal with the Se atoms bonded to four In neighbors; however, only ∼50% of the Se becomes electrically active. Part of the Se precipitates in the form of an In-Se phase, another part is compensated by defects which are not totally removed by annealing. The Se-In bond distance for a Se on a P site is 4.5% longer than the matrix In-P bond length, introducing large strains in the crystal. The solid solubility of Se in InP is estimated from our results to be ≈8.7×1019/cm3 while the electron concentration saturates at 5.4×1019/cm3. Se atoms in InP regrown at lower temperatures in a furnace are only ∼7% electrically active and are found to have different local environments (higher coordination number and shorter bond distance) than those in the InP perfectly regrown at higher temperature. © 1996 American Institute of Physics.

Citation Format(s)

Electrical activation and local structure of Se atoms in ion-implanted indium phosphide. / Yu, Kin Man; Chan, Ning; Hsu, Leonardo.
In: Journal of Applied Physics, Vol. 79, No. 11, 01.06.1996, p. 8445-8450.

Research output: Journal Publications and ReviewsRGC 62 - Review of books or of software (or similar publications/items)peer-review