Abstract
Diamond-like carbon (DLC) films possess high hardness, low friction coefficient, high chemical inertness and corrosive resistance and other attractive mechanical properties. However, due to the large differences in the physical and mechanical properties between DLC films and soft substrates, high residual stress results when DLC films are deposited on a soft substrate. This leads to poor film adhesion and limits the applications.
To reduce the high residual stress in the DLC film especially in the vicinity of the interface, it is very important to optimize the transitional and interfacial layer between the DLC film and the soft substrate. In this work, DLC films were deposited on 321 stainless steel substrates that had been pre-implanted with W. W ion implantation changed the surface chemistry of the 321 substrate, and the loading capacity and the resistance to plastic deformation of the enhanced substrate surface was observed to be markedly improved. At the same time, W is known for its chemical affinity to carbon and ion-beam-induced carbonization occurred on the steel surface. Therefore, W ion implantation not only creates a modified surface layer with higher hardness but also produces a carbon-rich layer that bodes well for the subsequent DLC deposition process by reducing the residual stress and improving film adhesion.
To reduce the high residual stress in the DLC film especially in the vicinity of the interface, it is very important to optimize the transitional and interfacial layer between the DLC film and the soft substrate. In this work, DLC films were deposited on 321 stainless steel substrates that had been pre-implanted with W. W ion implantation changed the surface chemistry of the 321 substrate, and the loading capacity and the resistance to plastic deformation of the enhanced substrate surface was observed to be markedly improved. At the same time, W is known for its chemical affinity to carbon and ion-beam-induced carbonization occurred on the steel surface. Therefore, W ion implantation not only creates a modified surface layer with higher hardness but also produces a carbon-rich layer that bodes well for the subsequent DLC deposition process by reducing the residual stress and improving film adhesion.
| Original language | English |
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| Title of host publication | 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides - Abstract Book |
| Publication status | Published - Sept 2005 |
| Event | 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides - Toulouse, France Duration: 11 Sept 2005 → 16 Sept 2005 |
Conference
| Conference | 16th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides |
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| Country/Territory | France |
| City | Toulouse |
| Period | 11/09/05 → 16/09/05 |
Research Keywords
- 321 stainless steel
- W
- ion implantation
- DLC film
- adhesion