Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge

G. Viera; S. N. Sharma; J. Costa; R. Q. Zhang; J. L. Andújar; E. Bertran

doi:10.1016/S0925-9635(97)00057-5

Author(s)

G. Viera
S. N. Sharma
J. Costa
J. L. Andújar
E. Bertran

Detail(s)

Original language	English
Pages (from-to)	1559-1563
Journal / Publication	Diamond and Related Materials
Volume	6
Issue number	10
Publication status	Published - Aug 1997
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1016/S0925-9635(97)00057-5 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0005549466&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(682a6b66-9dca-4df9-877a-b8281f5f54e2).html

Abstract

Hydrogenated SiC nanoparticles of high purity have been produced in radio frequency (RF) glow discharges from silane and methane gas mixtures. These nanoparticles show high surface reactivity and can undergo spontaneous oxidation when exposed to the atmosphere. In order to analyze the chemical stability of SiC particles, we present a study of the structural, chemical and compositional modifications induced by thermal annealing at different temperatures (400, 600 and 800°C). The post-treated powder was analyzed by RAMAN, FTIR and XPS spectroscopy. The effects of the thermal annealing of SiC powder include: change of colour from yellow to dark brown; hydrogen desorption; and an increase in C-C and Si-C bonds in detriment to Si-Si bonds. In addition, annealing with a KrF excimer laser induced the presence of Si and SiC nanocrystallites. © 1997 Elsevier Science S.A.

Research Area(s)

Glow discharge, Laser annealing, Nanoparticles, Powder, Silicon carbide, Thermal annealing

Citation Format(s)

[ RIS ] [ BibTeX ]

Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge. / Viera, G.; Sharma, S. N.; Costa, J. et al.
In: Diamond and Related Materials, Vol. 6, No. 10, 08.1997, p. 1559-1563.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Viera, G, Sharma, SN, Costa, J, Zhang, RQ, Andújar, JL & Bertran, E 1997, 'Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge', Diamond and Related Materials, vol. 6, no. 10, pp. 1559-1563. https://doi.org/10.1016/S0925-9635(97)00057-5

Viera, G., Sharma, S. N., Costa, J., Zhang, R. Q., Andújar, J. L., & Bertran, E. (1997). Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge. Diamond and Related Materials, 6(10), 1559-1563. https://doi.org/10.1016/S0925-9635(97)00057-5

Viera G, Sharma SN, Costa J, Zhang RQ, Andújar JL, Bertran E. Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge. Diamond and Related Materials. 1997 Aug;6(10):1559-1563. doi: 10.1016/S0925-9635(97)00057-5

Viera, G. ; Sharma, S. N. ; Costa, J. et al. / Effects of thermal and laser annealing on silicon carbide nanopowder produced in radio frequency glow discharge. In: Diamond and Related Materials. 1997 ; Vol. 6, No. 10. pp. 1559-1563.