Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Silicon Material Science
100
Doping (Additives) Material Science
100
Platinum Material Science
100
Silicide Material Science
66
Secondary Ion Mass ... Material Science
33
Transmission Electr... Material Science
33
Activation Energy Material Science
33
Single Crystal Material Science

Chemistry

100
Chemical Kinetics C... Chemistry
100
Platinum Chemistry
100
Doping Material Chemistry
100
Crystallinity Chemistry
100
Silicide Chemistry
100
Phosphorus Chemistry
75
Silicon Chemistry
50
Secondary Ion Mass ... Chemistry
25
Analytical Method Chemistry
25
Single Crystalline ... Chemistry
25
Reaction Activation... Chemistry
25
Rutherford Backscat... Chemistry
25
Transmission Electr... Chemistry
25
Doping Chemistry
25
Phosphorus Atom Chemistry

Keyphrases

100
Dopant Keyphrases
100
Crystallinity Keyphrases
100
Growth Kinetics Keyphrases
100
Polysilicon Keyphrases
100
Substrate Effect Keyphrases
100
Platinum Silicide Keyphrases
100
PtSi Keyphrases
66
Secondary Ion Mass ... Keyphrases
66
Phosphorus Keyphrases
33
Transmission Electr... Keyphrases
33
Diffraction Keyphrases
33
Single Crystal Keyphrases
33
Activation Energy Keyphrases
33
Phosphorus Doping Keyphrases
33
Depth Profile Keyphrases
33
Rutherford Backscat... Keyphrases
33
Undoped Keyphrases
33
Sequential Growth Keyphrases
33
Phosphorus Atoms Keyphrases
33
Phosphorus Profiles Keyphrases

INIS

100
doped materials INIS
100
substrates INIS
100
growth INIS
100
kinetics INIS
100
phosphorus INIS
100
platinum silicides INIS
80
polycrystals INIS
60
silicon INIS
40
interfaces INIS
40
ions INIS
40
mass spectroscopy INIS
20
transmission electr... INIS
20
x-ray diffraction INIS
20
atoms INIS
20
single crystals INIS
20
cross sections INIS
20
activation energy INIS
20
depth INIS
20
rutherford backscat... INIS

Physics

100
Substrates Physics
100
Growth Physics
100
Polycrystalline Physics
100
Crystallinity Physics
100
Platinum Physics
75
Spectrometer Physics
75
Silicon Physics
50
Ion Physics
25
Single Crystal Physics
25
Spectroscopy Physics
25
Transmission Electr... Physics
25
Diffraction Physics
25
Activation Energy Physics
25
Atom Physics
25
Backscattering Physics
Research OutputsResearch Output authored by Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides is tagged with the concept