Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides

H. Takai; P. A. Psaras; K. N. Tu

doi:10.1063/1.335548

Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides

H. Takai
, P. A. Psaras
, K. N. Tu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

21 Citations (Scopus)

Abstract

The growth kinetics of platinum silicides have been studied on four substrate categories: single-crystal, amorphous, undoped polycrystalline, and phosphorus-doped (8×10²⁰ at./cm³) polycrystalline silicon. The sequential growth of Pt₂Si and PtSi were analyzed by Rutherford backscattering spectroscopy (RBS), Seeman-Bohlin x-ray diffraction, and cross-section transmission electron microscopy. Phosphorus depth profiles were measured by secondary ion mass spectroscopy (SIMS). Our results conclude that the activation energies for the growth of Pt₂Si and PtSi are not affected by substrate crystallinity and doping of phosphorus. Analysis of the phosphorus profile by SIMS clearly showed that phosphorus atoms are segregated near the interface between PtSi and polycrystalline silicon, but not at the Pt₂Si/polycrystalline silicon interface.

Original language	English
Pages (from-to)	4165-4171
Journal	Journal of Applied Physics
Volume	58
Issue number	11
DOIs	https://doi.org/10.1063/1.335548
Publication status	Published - 1985
Externally published	Yes

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Access Output

10.1063/1.335548

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@article{dd8f40a576d14fc199720e7590f3ee58,

title = "Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides",

abstract = "The growth kinetics of platinum silicides have been studied on four substrate categories: single-crystal, amorphous, undoped polycrystalline, and phosphorus-doped (8×1020 at./cm3) polycrystalline silicon. The sequential growth of Pt2Si and PtSi were analyzed by Rutherford backscattering spectroscopy (RBS), Seeman-Bohlin x-ray diffraction, and cross-section transmission electron microscopy. Phosphorus depth profiles were measured by secondary ion mass spectroscopy (SIMS). Our results conclude that the activation energies for the growth of Pt2Si and PtSi are not affected by substrate crystallinity and doping of phosphorus. Analysis of the phosphorus profile by SIMS clearly showed that phosphorus atoms are segregated near the interface between PtSi and polycrystalline silicon, but not at the Pt2Si/polycrystalline silicon interface.",

author = "H. Takai and Psaras, \{P. A.\} and Tu, \{K. N.\}",

note = "Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected]. ",

year = "1985",

doi = "10.1063/1.335548",

language = "English",

volume = "58",

pages = "4165--4171",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "11",

}

TY - JOUR

T1 - Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides

AU - Takai, H.

AU - Psaras, P. A.

AU - Tu, K. N.

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 1985

Y1 - 1985

N2 - The growth kinetics of platinum silicides have been studied on four substrate categories: single-crystal, amorphous, undoped polycrystalline, and phosphorus-doped (8×1020 at./cm3) polycrystalline silicon. The sequential growth of Pt2Si and PtSi were analyzed by Rutherford backscattering spectroscopy (RBS), Seeman-Bohlin x-ray diffraction, and cross-section transmission electron microscopy. Phosphorus depth profiles were measured by secondary ion mass spectroscopy (SIMS). Our results conclude that the activation energies for the growth of Pt2Si and PtSi are not affected by substrate crystallinity and doping of phosphorus. Analysis of the phosphorus profile by SIMS clearly showed that phosphorus atoms are segregated near the interface between PtSi and polycrystalline silicon, but not at the Pt2Si/polycrystalline silicon interface.

AB - The growth kinetics of platinum silicides have been studied on four substrate categories: single-crystal, amorphous, undoped polycrystalline, and phosphorus-doped (8×1020 at./cm3) polycrystalline silicon. The sequential growth of Pt2Si and PtSi were analyzed by Rutherford backscattering spectroscopy (RBS), Seeman-Bohlin x-ray diffraction, and cross-section transmission electron microscopy. Phosphorus depth profiles were measured by secondary ion mass spectroscopy (SIMS). Our results conclude that the activation energies for the growth of Pt2Si and PtSi are not affected by substrate crystallinity and doping of phosphorus. Analysis of the phosphorus profile by SIMS clearly showed that phosphorus atoms are segregated near the interface between PtSi and polycrystalline silicon, but not at the Pt2Si/polycrystalline silicon interface.

UR - https://www.scopus.com/pages/publications/0003954055

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0003954055&origin=recordpage

U2 - 10.1063/1.335548

DO - 10.1063/1.335548

M3 - RGC 21 - Publication in refereed journal

SN - 0021-8979

VL - 58

SP - 4165

EP - 4171

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 11

ER -

Effects of substrate crystallinity and dopant on the growth kinetics of platinum silicides

Abstract

Bibliographical note

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this