Abstract
Plasma immersion ion implantation (PIII) was used to synthesize the amorphous carbon thin films on AISI440 steel. Raman spectroscopy, Auger electron spectroscopy, friction coefficient measurement and wear test were used to investigate the effect of the processing parameters, like radio frequency power, sample voltage pulse duty cycle, and target bias on the structure and surface properties of the films. The structure and surface properties were found to differ greatly under different PIII conditions.
| Original language | English |
|---|---|
| Pages (from-to) | 2164-2168 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 18 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - Sept 2000 |
| Event | 47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA Duration: 2 Oct 2000 → 6 Oct 2000 |
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