Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

Youming Liu; Liuhe Li; Ming Xu; Xun Cai; Qiulong Chen; Yawei Hu; Paul K. Chu

doi:10.1016/j.msea.2005.09.063

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

Youming Liu, Liuhe Li, Ming Xu, Xun Cai, Qiulong Chen, Yawei Hu, Paul K. Chu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

15 Citations (Scopus)

Abstract

The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum. © 2005 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	140-144
Journal	Materials Science and Engineering A
Volume	415
Issue number	1-2
DOIs	https://doi.org/10.1016/j.msea.2005.09.063
Publication status	Published - 15 Jan 2006

Research Keywords

Adhesion strength
Frictional behavior
Nitrogen ion implantation
TiN films

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title = "Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering",

abstract = "The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum. {\textcopyright} 2005 Elsevier B.V. All rights reserved.",

keywords = "Adhesion strength, Frictional behavior, Nitrogen ion implantation, TiN films",

author = "Youming Liu and Liuhe Li and Ming Xu and Xun Cai and Qiulong Chen and Yawei Hu and Chu, {Paul K.}",

year = "2006",

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doi = "10.1016/j.msea.2005.09.063",

language = "English",

volume = "415",

pages = "140--144",

journal = "Materials Science and Engineering A",

issn = "0921-5093",

publisher = "Elsevier Ltd.",

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Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering. / Liu, Youming; Li, Liuhe; Xu, Ming et al.
In: Materials Science and Engineering A, Vol. 415, No. 1-2, 15.01.2006, p. 140-144.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

TY - JOUR

T1 - Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

AU - Liu, Youming

AU - Li, Liuhe

AU - Xu, Ming

AU - Cai, Xun

AU - Chen, Qiulong

AU - Hu, Yawei

AU - Chu, Paul K.

PY - 2006/1/15

Y1 - 2006/1/15

N2 - The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum. © 2005 Elsevier B.V. All rights reserved.

AB - The performance of tribological coatings depends greatly on the adhesion strength between the coatings and substrates. In this work, we investigated the influence of the ion implantation energy of nitrogen on the adhesion and surface properties of TiN deposited on aluminum substrate. Aluminum samples were implanted with 15 keV, 30 keV and 40 keV nitrogen ions before TiN films were deposited using magnetron sputtering in a custom-designed multi-functional ion implanter. The adhesion properties of the implanted TiN films were assessed using nano-scratch tests and were observed to vary with the nitrogen ion implantation energy. Our frictional test results show that an appropriate ion implantation energy and dose can improve the frictional behavior of TiN films deposited on aluminum. © 2005 Elsevier B.V. All rights reserved.

KW - Adhesion strength

KW - Frictional behavior

KW - Nitrogen ion implantation

KW - TiN films

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-29244491683&origin=recordpage

U2 - 10.1016/j.msea.2005.09.063

DO - 10.1016/j.msea.2005.09.063

M3 - RGC 21 - Publication in refereed journal

SN - 0921-5093

VL - 415

SP - 140

EP - 144

JO - Materials Science and Engineering A

JF - Materials Science and Engineering A

IS - 1-2

ER -

Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

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