Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

Ricky K.Y. Fu; Ka Leung Fu; Xiubo Tian; Paul K. Chu

doi:10.1116/1.1648676

Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

Ricky K.Y. Fu
, Ka Leung Fu
, Xiubo Tian
, Paul K. Chu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

14 Citations (Scopus)

Abstract

The effects of cathodic plasma immersion ion implantation (PIII) utilized to enhance the surface properties of α-SiC ceramics were analyzed. The improvement was found to be more substantial when the mesh-assisted approach was adopted. The process was found to improve the surface hardness and reduce the friction coefficients. It was also found that when the mesh-assisted PIII was adopted the ion energy increased and the wear mechanism changed from predominantly abrasive to adhesive.

Original language	English
Pages (from-to)	356-360
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	2
DOIs	https://doi.org/10.1116/1.1648676
Publication status	Published - Mar 2004

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title = "Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics",

abstract = "The effects of cathodic plasma immersion ion implantation (PIII) utilized to enhance the surface properties of α-SiC ceramics were analyzed. The improvement was found to be more substantial when the mesh-assisted approach was adopted. The process was found to improve the surface hardness and reduce the friction coefficients. It was also found that when the mesh-assisted PIII was adopted the ion energy increased and the wear mechanism changed from predominantly abrasive to adhesive.",

author = "Fu, \{Ricky K.Y.\} and Fu, \{Ka Leung\} and Xiubo Tian and Chu, \{Paul K.\}",

year = "2004",

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Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics. / Fu, Ricky K.Y.; Fu, Ka Leung; Tian, Xiubo et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 22, No. 2, 03.2004, p. 356-360.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

TY - JOUR

T1 - Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

AU - Fu, Ricky K.Y.

AU - Fu, Ka Leung

AU - Tian, Xiubo

AU - Chu, Paul K.

PY - 2004/3

Y1 - 2004/3

N2 - The effects of cathodic plasma immersion ion implantation (PIII) utilized to enhance the surface properties of α-SiC ceramics were analyzed. The improvement was found to be more substantial when the mesh-assisted approach was adopted. The process was found to improve the surface hardness and reduce the friction coefficients. It was also found that when the mesh-assisted PIII was adopted the ion energy increased and the wear mechanism changed from predominantly abrasive to adhesive.

AB - The effects of cathodic plasma immersion ion implantation (PIII) utilized to enhance the surface properties of α-SiC ceramics were analyzed. The improvement was found to be more substantial when the mesh-assisted approach was adopted. The process was found to improve the surface hardness and reduce the friction coefficients. It was also found that when the mesh-assisted PIII was adopted the ion energy increased and the wear mechanism changed from predominantly abrasive to adhesive.

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U2 - 10.1116/1.1648676

DO - 10.1116/1.1648676

M3 - RGC 21 - Publication in refereed journal

SN - 0734-2101

VL - 22

SP - 356

EP - 360

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 2

ER -

Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

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