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Effects of long pulse width and high pulsing frequency on surface superhydrophobicity of polytetrafluoroethylene in quasi-direct-current plasma immersion ion implantation

  • Dixon T. K. Kwok
  • , Huaiyu Wang
  • , Yumei Zhang
  • , Kelvin W. K. Yeung
  • , Paul K. Chu

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Abstract

    Long pulse, high frequency quasi-direct-current (dc) oxygen plasma immersion ion implantation (PIII) is utilized to create a superhydrophobic polytetrafluoroethylene (PTFE) surface with a water contact angle of over 150°. This technique allows the use of a high duty cycle without deleterious effects such as extensive sample heating encountered in conventional PIII. Scanning electron microscopy images review submicrometer-nanometer structures on the PTFE surface after long pulse, high frequency PIII indicative of ion implantation. On the other hand, plasma modification is the dominant effect in short pulse, low frequency PIII. Quasi-dc PIII is demonstrated to offer adjustable synergistic plasma and ion beam effects. © 2009 American Institute of Physics.
    Original languageEnglish
    Article number53302
    JournalJournal of Applied Physics
    Volume105
    Issue number5
    DOIs
    Publication statusPublished - 2009

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