Abstract
Long pulse, high frequency quasi-direct-current (dc) oxygen plasma immersion ion implantation (PIII) is utilized to create a superhydrophobic polytetrafluoroethylene (PTFE) surface with a water contact angle of over 150°. This technique allows the use of a high duty cycle without deleterious effects such as extensive sample heating encountered in conventional PIII. Scanning electron microscopy images review submicrometer-nanometer structures on the PTFE surface after long pulse, high frequency PIII indicative of ion implantation. On the other hand, plasma modification is the dominant effect in short pulse, low frequency PIII. Quasi-dc PIII is demonstrated to offer adjustable synergistic plasma and ion beam effects. © 2009 American Institute of Physics.
| Original language | English |
|---|---|
| Article number | 53302 |
| Journal | Journal of Applied Physics |
| Volume | 105 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2009 |
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