Effects of doping and rapid thermal processing in Y doped CdO thin films

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

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Author(s)

  • Mengting Xie
  • Wei Zhu
  • Kin Man Yu
  • Zishu Zhu
  • Guanzhong Wang

Related Research Unit(s)

Detail(s)

Original languageEnglish
Pages (from-to)259-265
Journal / PublicationJournal of Alloys and Compounds
Volume776
Early online date24 Oct 2018
StateE-pub ahead of print - 24 Oct 2018

Abstract

We have synthesized Yttrium (Y)-doped Cadmium Oxide (YCO) thin films by radio frequency magnetron sputtering with Y doping concentration up to 9%. We find that as-deposited YCO films are polycrystalline in the rock-salt structure with electron concentration increases slightly with Y doping concentration. After rapid thermal processing (RTP), the crystallinity of YCO films are improved, resulting in an increased Y activation up to a free electron concentration of 9 × 1020/cm3 for samples with 9% Y. YCO films with low resistivity of 1.5 × 10−4 Ω cm and high mobility of 122 cm2/V are obtained with 1.4% Y doping after RTP at 500 °C. The drop in mobility and increase in intrinsic band gap with Y concentration can be understood in terms of the anticrossing interaction between localized d-states of Y and extended conduction band states of CdO.

Research Area(s)

  • Cadmium oxide, Radio frequency magnetron sputtering, Rapid thermal processing, Transition metal doping, Transparent conducting oxides

Citation Format(s)

Effects of doping and rapid thermal processing in Y doped CdO thin films. / Xie, Mengting; Zhu, Wei; Yu, Kin Man; Zhu, Zishu; Wang, Guanzhong.

In: Journal of Alloys and Compounds, Vol. 776, 05.03.2019, p. 259-265.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review