Effects of carbon and nitrogen ion implantations on surface and tribological properties of Ti-Al-Si-N coatings

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Original languageEnglish
Pages (from-to)149-154
Journal / PublicationSurface Engineering
Issue number2
Publication statusPublished - Mar 2012


The post-treatment of ion implantation on hard coatings attracts a great deal of attention because of the improvement in coating surface properties. The present research investigates the effect of nitrogen (N), carbon (C) and carbon followed with nitrogen (CzN) ion implantations on the structural and mechanical properties of the Ti-Al-Si-N coatings. Ion implantations were performed at an energy of 50 keV and different doses. The surface properties of the implanted layer were identified by a variety of analytic techniques, such as cross-sectional transmission electron microscopy, energy dispersive spectroscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and nanoindentation measurement. Additionally, the wear performance of the samples was evaluated by a typical ball on disc tribometer in dry conditions. The results showed that the surface properties depended strongly on the implanted species and doses. In addition, a great improvement in the wear was observed on the samples with the post-treatment process of C and CzN ion implantations. © 2012 Institute of Materials, Minerals and Mining.

Research Area(s)

  • Ion implantation, Metal vapour vacuum arc, TiAlSiN, Wear