@inproceedings{59c3a2831590445bacf65317a9af6f24,
title = "Effects of aluminum and nitrogen plasma immersion ion implantation on mechanical properties and oxidation resistance of copper",
author = "An, \{Q. Z.\} and T. Hu and Xin, \{Y. C.\} and X. Cai and Fu, \{R. K Y\} and Chu, \{Paul K.\}",
year = "2009",
doi = "10.1109/PLASMA.2009.5227498",
language = "English",
isbn = "9781424426188",
booktitle = "IEEE International Conference on Plasma Science",
note = "36th International Conference on Plasma Science and 23rd Symposium on Fusion Engineering ; Conference date: 31-05-2009 Through 05-06-2009",
}