Effects and mechanisms of nitrogen incorporation into hafnium oxide by plasma immersion implantation

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Fingerprint

???publication_fingerprints_help???

Material Science

100
Film Material Science
100
Oxide Compound Material Science
100
Hafnium Material Science
50
Ion Implantation Material Science
50
Density Material Science
50
Temperature Material Science
50
Capacitance Material Science
50
Interface Property Material Science

Biochemistry, Genetics and Molecular Biology

100
Atom Biochemistry, Genetics an...
100
Immersion Biochemistry, Genetics an...
100
Blood Plasma Biochemistry, Genetics an...
33
Volume Biochemistry, Genetics an...
33
Density Biochemistry, Genetics an...
33
Temperature Biochemistry, Genetics an...
33
Electric Potential Biochemistry, Genetics an...
33
Vacuum Biochemistry, Genetics an...
33
Dose Biochemistry, Genetics an...

Chemistry

100
Reaction Mechanism Chemistry
100
Nitrogen Chemistry
100
Oxide Chemistry
100
Hafnium Chemistry
75
Nitrogen Atom Chemistry
50
Amount Chemistry
25
Structure Chemistry
25
Procedure Chemistry
25
Vacuum Chemistry
25
Reaction Temperatur... Chemistry
25
Voltage Chemistry
25
Dose Chemistry
25
Ion Implantation Chemistry
25
Interface Property Chemistry
25
Trap Density Measur... Chemistry
25
Shapes Chemistry
25
Volume Chemistry

Keyphrases

100
Nitrogen Atom Keyphrases
100
Plasma Immersion Keyphrases
100
Hafnium Oxide Keyphrases
100
Nitrogen Incorporat... Keyphrases
66
Trace Amount Keyphrases
33
Plasma Immersion Io... Keyphrases
33
Implantation Dose Keyphrases
33
Temperature Effect Keyphrases
33
Nitrogen Effect Keyphrases
33
Capacitance-voltage Keyphrases
33
Si Structures Keyphrases
33
Ion Implantation Te... Keyphrases
33
Si-N Keyphrases
33
Characteristics Mea... Keyphrases
33
Interface Propertie... Keyphrases
33
O Vacancy Keyphrases
33
Oxide Trap Density Keyphrases
33
Interface Traps Keyphrases

INIS

100
nitrogen INIS
100
plasma INIS
100
hafnium oxides INIS
42
atoms INIS
42
interfaces INIS
42
oxygen INIS
28
films INIS
28
trace amounts INIS
28
vanadium oxides INIS
14
ion implantation INIS
14
bonding INIS
14
oxides INIS
14
doses INIS
14
voltage INIS
14
vacancies INIS
14
traps INIS
14
temperature depende... INIS
14
density INIS
14
capacitance INIS
14
physics INIS

Engineering

100
Mechanisms Engineering
100
Nitrogen Atom Engineering
33
Ion Implantation Engineering
33
Characteristics Engineering
33
Voltage Engineering
33
Capacitance Engineering
33
Measurement Engineering
33
Temperature Engineering
33
Density Engineering

Chemical Engineering

100
Nitrogen Chemical Engineering
100
Hafnium Oxides Chemical Engineering
28
Film Chemical Engineering
14
Oxide Chemical Engineering
14
Temperature Chemical Engineering
Research OutputsResearch Output authored by Effects and mechanisms of nitrogen incorporation into hafnium oxide by plasma immersion implantation is tagged with the concept