Effective Implantation of Sodium into Silicon Wafer by Enhanced Glow Discharge Plasma Immersion Ion Implantation

Q Y LU, H B LIU, D T K KWOK, L H LI, R K Y FU, Paul CHU

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Proceedings of the 6th Symposium on Functional Coatings and Surface Engineering
Pages	23
Publication status	Published - 5 Jun 2011
Event	6th Symposium on Functional Coatings and Surface Engineering - , Canada Duration: 5 Jun 2011 → 8 Jun 2011

Conference	6th Symposium on Functional Coatings and Surface Engineering
Country/Territory	Canada
Period	5/06/11 → 8/06/11

Other Access Options

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title = "Effective Implantation of Sodium into Silicon Wafer by Enhanced Glow Discharge Plasma Immersion Ion Implantation",

author = "LU, {Q Y} and LIU, {H B} and KWOK, {D T K} and LI, {L H} and FU, {R K Y} and Paul CHU",

year = "2011",

month = jun,

day = "5",

language = "English",

pages = "23",

booktitle = "Proceedings of the 6th Symposium on Functional Coatings and Surface Engineering",

note = "6th Symposium on Functional Coatings and Surface Engineering ; Conference date: 05-06-2011 Through 08-06-2011",

}

Effective Implantation of Sodium into Silicon Wafer by Enhanced Glow Discharge Plasma Immersion Ion Implantation. / LU, Q Y; LIU, H B; KWOK, D T K et al.
Proceedings of the 6th Symposium on Functional Coatings and Surface Engineering. 2011. p. 23.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Effective Implantation of Sodium into Silicon Wafer by Enhanced Glow Discharge Plasma Immersion Ion Implantation

AU - LU, Q Y

AU - LIU, H B

AU - KWOK, D T K

AU - LI, L H

AU - FU, R K Y

AU - CHU, Paul

PY - 2011/6/5

Y1 - 2011/6/5

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 23

BT - Proceedings of the 6th Symposium on Functional Coatings and Surface Engineering

T2 - 6th Symposium on Functional Coatings and Surface Engineering

Y2 - 5 June 2011 through 8 June 2011

ER -