Effect of oxygen flow ratio on the wetting behavior, microstructure and mechanical properties of CeO2−x coatings prepared by magnetron sputtering

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)333-338
Journal / PublicationSurface and Coatings Technology
Volume320
Publication statusPublished - 25 Jun 2017

Abstract

In this study, cerium oxide (CeO2−x) coatings were prepared by magnetron sputtering in a gas mixture of Ar and O2. The effect of oxygen flow ratio (fO2) on the surface morphology, wetting behavior, chemical composition, microstructure and mechanical properties of CeO2−x coating were systematically investigated. The results showed that all CeO2−x coatings exhibited smooth surfaces and similar wetting behaviors with a hydrophobic feature. The water contact angle stabilized around 100°. Surface chemistry varied with different oxygen flow ratios and the presence of excess surface lattice oxygen led to a slight decrease in hydrophobicity. X-ray diffraction (XRD) analyses showed that the coating grown in pure Ar exhibited weak crystalline peaks. While after the incorporation of oxygen, CeO2−x coatings crystallized in a cubic CeO2 phase with preferred (111) orientation, and the peak intensity gradually decreased with increasing fO2. TEM study revealed the face-centered cubic (fcc) crystalline feature of deposited coatings and obtained Fast Fourier Transformation (FFT) pattern confirmed the disordered crystalline structure among the coating deposited at 56% fO2. The hardness and elastic modulus of the coating could achieve ~ 18.1 GPa and ~ 190.2 GPa when deposited at 7% fO2, then decreased slightly with further increasing fO2.

Research Area(s)

  • CeO2−x coatings, Magnetron sputtering, Microstructure, Oxygen flow ratio, Surface chemistry, Wetting behavior

Citation Format(s)

Effect of oxygen flow ratio on the wetting behavior, microstructure and mechanical properties of CeO2−x coatings prepared by magnetron sputtering. / Shi, Zhen; Shum, Powan; Zhou, Zhifeng; Li, Lawrence Kwok-Yan.

In: Surface and Coatings Technology, Vol. 320, 25.06.2017, p. 333-338.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal