Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • M. K. Fung
  • W. C. Chan
  • Z. Q. Gao
  • I. Bello
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)472-476
Journal / PublicationDiamond and Related Materials
Volume8
Issue number2-5
Publication statusPublished - Mar 1999

Abstract

Diamond-like carbon (DLC) and nitrogenated DLC (a-C:N) films were prepared on Si and glass substrates using an electron cyclotron resonance-assisted microwave plasma chemical vapour deposition (ECR-MPCVD) system with radio frequency substrate bias. The hardness and optical bandgap of the resulting films were investigated and correlated to the elemental and phase composition. The a-C:N films, deposited under conditions identical to those for the DLC films except for the introduction of a nitrogen flow, contain nitrogen which partly substitutes for hydrogen and forms carbon-nitrogen triple bonds. These bonds obstruct the formation of carbon-carbon cross-linking, resulting in softer films. These changes can be interpreted with reference to various changes of active vibronic states determined by Raman spectroscopy.

Research Area(s)

  • Chemical vapor deposition, Cyclotron resonance, Diamond-like carbon, Nitrogen

Citation Format(s)

Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD. / Fung, M. K.; Chan, W. C.; Gao, Z. Q. et al.
In: Diamond and Related Materials, Vol. 8, No. 2-5, 03.1999, p. 472-476.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review