Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Pages (from-to) | 472-476 |
| Journal / Publication | Diamond and Related Materials |
| Volume | 8 |
| Issue number | 2-5 |
| Publication status | Published - Mar 1999 |
Link(s)
Abstract
Diamond-like carbon (DLC) and nitrogenated DLC (a-C:N) films were prepared on Si and glass substrates using an electron cyclotron resonance-assisted microwave plasma chemical vapour deposition (ECR-MPCVD) system with radio frequency substrate bias. The hardness and optical bandgap of the resulting films were investigated and correlated to the elemental and phase composition. The a-C:N films, deposited under conditions identical to those for the DLC films except for the introduction of a nitrogen flow, contain nitrogen which partly substitutes for hydrogen and forms carbon-nitrogen triple bonds. These bonds obstruct the formation of carbon-carbon cross-linking, resulting in softer films. These changes can be interpreted with reference to various changes of active vibronic states determined by Raman spectroscopy.
Research Area(s)
- Chemical vapor deposition, Cyclotron resonance, Diamond-like carbon, Nitrogen
Citation Format(s)
Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD. / Fung, M. K.; Chan, W. C.; Gao, Z. Q. et al.
In: Diamond and Related Materials, Vol. 8, No. 2-5, 03.1999, p. 472-476.
In: Diamond and Related Materials, Vol. 8, No. 2-5, 03.1999, p. 472-476.
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
