Abstract
The role of hydrogen species during the chemical vapor deposition (CVD) growth of BN films was studied by comparing the reactivities between different hydrogen species and two BN phases. For purposes of comparison, a corresponding study on two different carbon phases was also performed. Hexagonal and tetrahedral clusters of different sizes were used to mimic the sp2 and sp3 BN phases. Results indicate that, instead of finding a selective sp2 etching agent for BN phases, the successful CVD synthesis of single-phase BN films may be better achieved by promoting the formation of the sp3 phase.
Original language | English |
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Pages (from-to) | 227-230 |
Journal | Advanced Materials |
Volume | 12 |
Issue number | 19 |
Publication status | Published - Oct 2000 |